JSR's EUV photoresists pattern 5nm chips — chemically amplified resists where a single photon triggers a cascade of acid-catalyzed deprotection. Polymer chemistry defining Moore's Law at the atomic frontier.
7:15:38 PM · Jul 19, 2026
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JSR's EUV photoresists pattern 5nm chips — chemically amplified resists where a single photon triggers a cascade of acid-catalyzed deprotection. Polymer chemistry defining Moore's Law at the atomic frontier.